Blank Cover Image

Application of deep-UV resist for 0.25-ヲフm metal and poly processing

Author(s):
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. Year:
1996
Vol.:
Part1
Page(from):
125
Page(to):
134
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

Similar Items:

Krisa,W.L., Shaw,S.Y., Brennan,K., Dixit,G.A., Jain,M.K.

SPIE-The International Society for Optical Engineering

Beeck,M.Op de, Ronse,K., Ghandehari,K., Jaenen,P., Botermans,H., Finders,J., Lilygren,J.A., Baker,D.C., Vandenberghe,G., …

SPIE-The International Society for Optical Engineering

Orvek,K.J., Dass,S.K., Gruber,L., Dumford,S.A., Piasecki,M., Pollard,G.W., Fink,I.D.

SPIE-The International Society for Optical Engineering

Venkatraman, R., Jain, A., Farkas, J., Mendonca, J., Hamilton, G., Capasso, C., Denning, D., Simpson, C., Rogers, B., …

MRS - Materials Research Society

Gerung,H., Chhagan,V.K., Yelehanka,P.R., Zhou,M.S., Hui,J.K.L.

SPIE - The International Society for Optical Engineering

Tritchkov,A., Rieger,M.L., Stirniman,J.P., Yen,A., Ronse,K., Vandenberghe,G., hove,L.Van den

SPIE-The International Society for Optical Engineering

Dass,S.K., Orvek,K.J., Gruber,L., Broomfield,M.C., Tremblay,J., Piasecki,M.

SPIE-The International Society for Optical Engineering

Park,C.-H., Rhie,S.-U., Choi,J.-H., Park,J.-S., Seo,H.-W., Kim,Y.-H., Park,Y.-K., Han,W.-S., Lee,W.-S., Kong,J.-T.

SPIE - The International Society for Optical Engineering

Lee,C.Y., Ma,W.W., Lim,E.H., Cheng,A., Joy,R., Ross,M.F., Wong,S.S., Marlowe,T.

SPIE - The International Society for Optical Engineering

Chen, L. J., Cheng, S. L., Chang, S. M., Peng, Y. C., Huang, H. Y., Cheng, L. W.

MRS - Materials Research Society

Park,K.-Y., Choi,B.-I., Lee,W.-G., Ko,C.-G.

SPIE-The International Society for Optical Engineering

Williamson,D.M., McClay,J.A., Andresen,K.W., Gallatin,G.M., Himel,M.D., Ivaldi,J., Mason,C., McCullough,A.W., Otis,C., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12