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Sub-quarter-micrometer contact hole fabrication using annular illumination

Author(s):
Erdelyi,M. ( Jozsef Attila Univ. )
Bor,Z.
Szabo,G.
Cavallaro,J.R.
Smayling,M.C.
Tittel,F.K.
Wilson,W.L.
2 more
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. Year:
1996
Vol.:
Part1
Page(from):
88
Page(to):
93
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

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