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Profiling the Deep Levels in SiGe/Si Microstructure by Small-Pulse Deep Level Transient Spectroscopy

Author(s):
Zhang,R.
Yang,K.
Qing,G.-Y.
Shi,Y.
Gu,S.-L.
Wang,R.-H.
Hu,L.-Q.
Gao,W.-Z.
Zheng,Y.-D.
4 more
Publication title:
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995
Title of ser.:
Materials science forum
Ser. no.:
196-201
Pub. Year:
1995
Pt.:
1
Page(from):
485
Page(to):
490
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497164 [0878497161]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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