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Irradiation Induced Lattice Defects in Si1-xGex Epitaxial Devices

Author(s):
Ohyama,H.
Vanhellemont,J.
Takami,Y.
Hayama,K.
Kudo,T.
Hakata,T.
Kobayashi,K.
Sunaga,H.
Poortmans,J.
Caymax,M.
5 more
Publication title:
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995
Title of ser.:
Materials science forum
Ser. no.:
196-201
Pub. date:
1995
Pt.:
1
Page(from):
371
Page(to):
376
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497164 [0878497161]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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