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Dopant Diffusion in Strained and Relaxed Si1-xGex

Author(s):
Paine,A.D.N.
Morooka,M.
Willoughby,A.F.W.
Bonar,J.M.
Phillips,P.
Dowsett,M.G.
Cooke,G.
2 more
Publication title:
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995
Title of ser.:
Materials science forum
Ser. no.:
196-201
Pub. Year:
1995
Pt.:
1
Page(from):
345
Page(to):
348
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497164 [0878497161]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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