Blank Cover Image

Photoluminescence and Electron-Spin-Resonance Studies of Defects in Ion-Implanted Thermal SiO2 Films

Author(s):
Nishikawa,H.
Fukui,H.
Watanabe,E.
Ito,D.
Takiyama,M.
Ieki,A.
Ohki,Y.
2 more
Publication title:
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995
Title of ser.:
Materials science forum
Ser. no.:
196-201
Pub. Year:
1995
Pt.:
1
Page(from):
97
Page(to):
101
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497164 [0878497161]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photoluminescence and Electron-Spin-Resonance Studies of Defects in Amorphous SiO2 Films

Nishikawa, H., Fukui, H., Watanabe, E., Ito, D., Seol, K.S., Ishii, K., Ohki, Y., Takiyama, M., Tachimori, M.

Electrochemical Society
7 Conference Proceedings Electron Paramagnetic Resonance and Photoluminescence Studies of Point Defects in Zinc Germanium Phosphide (ZnGeP2)

Setzler, S. D., Halliburton, L. E., Giles, N. C., Schunemann, P. G., Pollak, T. M.

MRS - Materials Research Society
2 Conference Proceedings Photoluminescence Study on Point Defects in SIMOX Buried SiO2 Film

Seol,K.S., Ieki,A., Ohki,Y., Nishikawa,H., Tachimori,M.

Trans Tech Publications
8 Conference Proceedings Photoluminescence of Ge Nanoclusters in Ion Implanted SiO2

Lopes, J.M.J., Zawislak, F.C., Behar, M., Fichtner, P.F.P., Rebohle, L., Skorupa, W.

Materials Research Society
3 Conference Proceedings Visible Photoluminescence from Si Ion-Implanted and Thermally-Annealed SiO2 Films

Kanemitsu, Y., Shimizu, N., Okamoto, S., Komoda, T., Hemment, P. L. F., Seaiy, B. J.

MRS - Materials Research Society
9 Conference Proceedings A Review of Electron Spin Resonance Spectroscopy of Defects in Thin Film SiO2 on Silicon

Conley, J., Lenahan, P.

Electrochemical Society
4 Conference Proceedings ELECTRON PARAMAGNETIC RESONANCE STUDIES OF INTRINSIC BONDING DEFECTS AND IMPURITIES IN SiO2 THIN SOLID FILM

Schwartz, Robert N., Clark, Marlon D., Chalitrat, Walee, Kevan, larry

Materials Research Society
10 Conference Proceedings *Characterization of the Pb1 interface defect in thermal (100)Si/SiO2 by electron spin resonance: 29Si hyperfine structure and electrical relevance

Stesmans, A. L.

MRS-Materials Research Society
5 Conference Proceedings Photoluminescence characterization of defects in thermal oxide

Nishikawa, Hiroyuki, Stathis, James H.

MRS-Materials Research Society
11 Conference Proceedings Ion implantation into Si covered by HfO2 or SiO2 film

Shi, H., Yu, M., Huang, R., Zhang, X., Wang, Y.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Electron spin resonance features of the Pb1 interface defect in thermal(100)Si/SiO2

Stesmans,A., Afanas'ev,V.V.

Trans Tech Publications
12 Conference Proceedings ION-IMPLANTATION EFFECTS ON SPIN-ON-GLASS (SOL-GEL) SiO2 FILMS

Shacham-Diamand, Y., Moriya, N., Kalish, R.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12