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Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface

Author(s):
Publication title:
Semiconductor processing and characterization with lasers : applications in photovoltaics : proceedings of the First International Symposium, Stuttgart, Germany, April 18-20, 1994
Title of ser.:
Materials science forum
Ser. no.:
173-174
Pub. Year:
1995
Page(from):
209
Page(to):
214
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496839 [0878496831]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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