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Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex

Author(s):
Thomsen,E.V.
Larsen,A.Nylandsted
Hansen,J.L.
Kringhoj,P.
Shiryaev,S.Y.
Weyer,G.
1 more
Publication title:
Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993
Title of ser.:
Materials science forum
Ser. no.:
143-147
Pub. date:
1994
Vol.:
Pt.1
Page(from):
513
Page(to):
517
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496716 [0878496718]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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