Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope

Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope

Author(s):

Laddada,R. ( Univ.de Technologie de Troyes(France) )
Adam,P.M. ( Univ.de Technologie de Troyes(France) )
Royer,P. ( Univ.de Technologie de Troyes(France) )
Bijeon,J.L. ( Univ.de Technologie de Troyes(France) )

Publication title:

Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3098

Pub. Year:

1997

Page(from):

506

Page(to):

513

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425188 [0819425184]

Language:

English

Call no.:

P63600/3098

Type:

Conference Proceedings

Details

TDL ID:	ZA00020194
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Optical Inspection and Micromeasurements
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	Munich, FRG
Conf. info. (Date):	1997.06.16-1997.06.19

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