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Interferometer for optical waviness and figure testing

Author(s):
Freischlad,K.R. ( Phase Shift Technology(USA) )  
Publication title:
Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3098
Pub. date:
1997
Page(from):
53
Page(to):
61
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425188 [0819425184]
Language:
English
Call no.:
P63600/3098
Type:
Conference Proceedings

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