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Uniform stress effect on initial stages of oxygen precipitation in Czochralski-grown silicon (Invited Paper)

Author(s):
Misiuk,A. ( Institute of Electron Technology (Poland) )  
Publication title:
Solid state crystals, growth and characterization : 7-11 October 1996, Zakopane, Poland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3178
Pub. Year:
1997
Page(from):
230
Page(to):
237
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426048 [0819426040]
Language:
English
Call no.:
P63600/3178
Type:
Conference Proceedings

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