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Frequency response of an inchworm motor fabricated with micromachined interlocking surface mesoscale actuator device (MAD)

Author(s):
  • Chen,Q. ( Univ.of California/Los Angeles )
  • Yao,D.-J. ( Univ.of California/Los Angeles )
  • Kim,C.-J. ( Univ.of California/Los Angeles )
  • Carman,G.P. ( Univ.of California/Los Angeles )
Publication title:
Smart Structures and Materials 1998: Smart Structures and Integrated Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3329
Pub. Year:
1998
Vol.:
Part 2
Page(from):
768
Page(to):
779
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427731 [081942773X]
Language:
English
Call no.:
P63600/3329
Type:
Conference Proceedings

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