Integration of a W-plug in an Al-based metallization scheme for O.25-ｦﾌm IC technology

Integration of a W-plug in an Al-based metallization scheme for O.25-ｦﾌm IC technology

Author(s):

Sengupta,S.S. ( VLSI Technology,Inc. )
Bothra,S. ( VLSI Technology,Inc. )

Publication title:

Multilevel Interconnect Technology II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3508

Pub. Year:

1998

Page(from):

110

Page(to):

121

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429674 [0819429678]

Language:

English

Call no.:

P63600/3508

Type:

Conference Proceedings

Details

TDL ID:	ZA00020162
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Multilevel Interconnect Technology
Conf. info. (Number):	1998 : 2nd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.23-1998.09.24

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