Integration of hydrogen silsesquioxane into an advanced BiCMOS process

Integration of hydrogen silsesquioxane into an advanced BiCMOS process

Author(s):

Olewine,M. ( Philips Semiconductors )
Wall,R. ( Philips Semiconductors )
Colovos,C.J. ( Philips Semiconductors )

Publication title:

Multilevel Interconnect Technology II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3508

Pub. Year:

1998

Page(from):

42

Page(to):

50

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429674 [0819429678]

Language:

English

Call no.:

P63600/3508

Type:

Conference Proceedings

Details

TDL ID:	ZA00020162
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Multilevel Interconnect Technology
Conf. info. (Number):	1998 : 2nd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.23-1998.09.24

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