Interference measurements for roughness of silicon mirror with Twyman interferometer
- Author(s):
- Publication title:
- Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3558
- Pub. Year:
- 1998
- Page(from):
- 161
- Page(to):
- 164
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430199 [0819430196]
- Language:
- English
- Call no.:
- P63600/3558
- Type:
- Conference Proceedings
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