Modification of epitaxial oxide films with ion implantation

Modification of epitaxial oxide films with ion implantation

Author(s):

Hong, S.H. ( Department of Electrical Engineering, Columbia University )

Miller, J.R. ( Department of Electrical Engineering, Columbia University )

Ma, Q.Y. ( Department of Electrical Engineering, Columbia University )

Yang, E.S. ( Department of Electrical Engineering, Columbia University )

Fenner, D.B. ( AFR Inc. )

Yang, C.Y. ( Microelectronics Laboratory, Santa Clara University )

Budnick, J.I. ( Department of Physics, University of Connecticut )

2 more

Publication title:

Epitaxial oxide thin films II : symposium held November 26-30, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

401

Pub. Year:

1996

Page(from):

309

Page(to):

314

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558993044 [1558993045]

Language:

English

Call no.:

M23500/401

Type:

Conference Proceedings

Details

TDL ID:	ZA00020157
Series ID:	PA00000011
Conf. info. (Name):	Symposium on epitaxial oxide thin films
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.26-1995.11.30

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