Blank Cover Image

PROCESSING AND DEVICE ISSUES OF HIGH PERMITTIVITY MATERIALS FOR DRAMS

Author(s):
Publication title:
Science and technology of electroceramic thin films
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
284
Pub. Year:
1995
Page(from):
373
Page(to):
382
Pages:
10
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792333326 [0792333322]
Language:
English
Call no.:
N11482/284
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TIME EFFICIENT CORONA DISCHARGE METHODS FOR MAKING CAPACITANCE MEASUREMENTS FOR HIGH-DENSITY DRAM MATERIALS

Crenshaw, D.L., Gupta, I.J., Lin, B.Y., Plumton, D., Bevan, M., Banerjee, A., Wise, R., Horner, G.S.

Electrochemical Society
7 Conference Proceedings HIGH-RESOLUTION MICROSCOPY OF CERAMICS

Carter, C.B., McKernan, S., Rasmussen, D.R., Simpson, Y.K., Summerfelt, S.R., Susnitzky, D.W., Tietz, L.A.

Materials Research Society
2 Conference Proceedings CROSS-SECTIONAL TEM STUDIES OF BARIUM STRONTIUM TITANATE DEPOSITED ON SILICON BY PULSED LASER ABLATION

Pinizzotto, R.F., Jacobs, E.G., Yang, H., Summerfelt, S.R., Gnade, B.E.

Materials Research Society
8 Conference Proceedings *Group IVB oxides as high permittivity gate insulators

Campbell, S. A., He, B., Smith, R., Ma. T., Hoilien, N., Taylor, C., Gladfelter, W. L.

MRS-Materials Research Society
3 Conference Proceedings ArF issues of 90-nm-node DRAM device integration

Goo, D.-H., Kim, B.-S., Park, J.-S., Yoon, K.-S., Lee, J.-H., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Critical Materials, Device Design, Performance and Reliability Issues in 4H-SiC Power UMOSFET Structures

Agarwal, A. K., Siergiej, R. R., Seshadri, S., White, M. H., McMullin, P. G., Burk, A. A., Rowland, L. B., Brandt, C. …

MRS - Materials Research Society
4 Conference Proceedings Evolution of Texture and Microstructure in Rough Polycrystalline Silicon for Advanced DRAM Applications

Banerjee, A., Wise, R. L., Crenshaw, D. L., Khamankar, R. B., Edwards, Hal

MRS - Materials Research Society
10 Conference Proceedings Barium Strontium Titanate Capacitors for Future High Density DRAMs

Jones, R.E., Jr., Zafar, S., white, B.E., Jiang, B., Melnick, B.M., Zurcher, P., Chu, P.Y., Taylor, D.J., Remmel, T.P., …

Electrochemical Society
5 Conference Proceedings Contact Processes For Advanced DRAM And CMOS Logic Devices*

Gambino, J., Bandy, K., Chapple-Sokol, J., Conti, R., Dobuzinsky, D., Iggulden, R., Maldei, M., Peterson, K., Rupp, T., …

Electrochemical Society
11 Conference Proceedings Display bandwidth reduction via latched pixels and processing at the pixel

Gnade, B., Akinwande, A., Shashidhar, R., Larimer, J. O.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Electrodes and Barriers for DRAM and FERAM: Processing, Integration, and Fundamentals

Saenger, K.L., Andricacos, P.C., Athavale, S.D., Baniecki, J.D., Cabral, C., Jr., Costrini, G., Kwietniak, K.T., …

Materials Research Society
12 Conference Proceedings Successful application of angular scatterometry to process control in sub-100-nm DRAM device

Kim, J.-, Kim, S.-J., Chin, S.-B., Oh, S.-H., Goo, D.-H., Lee, S.-J., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T., …

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12