Fabrication, Investigation and Manipulation of Artificial Nanostructures
- Author(s):
Menschig A. Prins F. E. Lehr G. Bergmann R. Hommel J. Griesinger U. A. Harle V. Scholz F. Schweizer H. - Publication title:
- Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 264
- Pub. Year:
- 1994
- Page(from):
- 81
- Page(to):
- 85
- Pages:
- 5
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792327943 [0792327942]
- Language:
- English
- Call no.:
- N11482/264
- Type:
- Conference Proceedings
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