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Silicon Epitaxy

Author(s):
Robinson McD.  
Publication title:
Microelectronic materials and processes
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
164
Pub. Year:
1989
Page(from):
25
Page(to):
78
Pages:
54
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792301479 [0792301471]
Language:
English
Call no.:
N11482/164
Type:
Conference Proceedings

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