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Submicron Patterning Techniques for Integrated Circuits

Author(s):
Publication title:
Low-dimensional structures in semiconductors : from basic physics to applications
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
281
Pub. Year:
1991
Page(from):
89
Page(to):
108
Pages:
20
Pub. info.:
New York: Plenum Press
ISBN:
9780306440861 [0306440865]
Language:
English
Call no.:
N11479/281
Type:
Conference Proceedings

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