Nanolithography by tip-enhanced laser irradiation
- Author(s):
- Publication title:
- Photonic Systems and Applications in Defense and Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3898
- Pub. Year:
- 1999
- Page(from):
- 200
- Page(to):
- 207
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435002 [0819435007]
- Language:
- English
- Call no.:
- P63600/3898
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Investigation On Laser-Induced Effects In Nanostructure Fabrication With Laser-Irradiated Scanning Tunneling Microscope Tips In Air Ambient
Materials Research Society |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Kinetic study of nanofabrication on gold films by atomic force microscope tips under laser radiation
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Surface analysis of TiN thin film deposited on silicon(100)by excimer laser
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Laser cleaning of microparticles:theoretical prediction of threshold laser fluence
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |