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Nanolithography by tip-enhanced laser irradiation

Author(s):
Publication title:
Photonic Systems and Applications in Defense and Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3898
Pub. Year:
1999
Page(from):
200
Page(to):
207
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435002 [0819435007]
Language:
English
Call no.:
P63600/3898
Type:
Conference Proceedings

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