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Silicon ultraviolet photodiode processing via integrated MOS capacitors

Author(s):
Publication title:
Ultraviolet atmospheric and space remote sensing : methods and instrumentation II : 22 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3818
Pub. Year:
1999
Page(from):
189
Page(to):
197
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819433046 [0819433047]
Language:
English
Call no.:
P63600/3818
Type:
Conference Proceedings

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