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Progress in the development of three-aspherical mirror optics for EUVL

Author(s):
Kinoshita,H. ( Himeji Institute of Technology )
Watanabe,T.
Bajuk,D.J.
Daniel,J.
Kimpara,Y.
Kriese,M.D.
Platonov,Y.Y.
2 more
Publication title:
EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3767
Pub. Year:
1999
Page(from):
164
Page(to):
171
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432537 [0819432539]
Language:
English
Call no.:
P63600/3767
Type:
Conference Proceedings

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