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Fabrication and deflection measurement of micromirrors supported by an S-shape girder

Author(s):
Publication title:
Diffractive and holographic technologies, systems, and spatical light modulators VI : 27-29 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3633
Pub. Year:
1999
Page(from):
139
Page(to):
147
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431035 [0819431036]
Language:
English
Call no.:
P63600/3633
Type:
Conference Proceedings

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