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New approach to optical proximity correction

Author(s):
Rosenbusch,A. ( Sigma-C GmbH )
Juffermans,A.H.
Kirsch,H.
Lalanne,F.P.
Maurer,W.
Romeo,C.
Ronse,K.
Schiavone,P.
Simecek,M.
Toublan,O.
Watson,J.C.
Ziegler,W.
Zimmermann,R.
8 more
Publication title:
18th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3546
Pub. Year:
1998
Page(from):
585
Page(to):
593
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430076 [0819430072]
Language:
English
Call no.:
P63600/3546
Type:
Conference Proceedings

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