CD guarantee for the next-generation photomasks with CD-SEM

Author(s):

• Iwamatsu,T. ( Semiconductor Leading Edge Technologies, Inc.(Japan) )
• Hiruta,K.
• Morimoto,H.
• Ataka,M.
• Nitta,J.

Publication title:

18th Annual BACUS Symposium on Photomask Technology and Management

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3546

Pub. Year:

1998

Page(from):

505

Page(to):

512

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430076 [0819430072]

Language:

English

Call no.:

P63600/3546

Type:

Conference Proceedings