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Advanced mask cleaning for 0.20-ｦﾌm technology:an integrated user-supplier approach

Author(s):
Poschenrieder,R. ( Siemens AG (Germany) )
Hay,B.
Beier,M.
Hourd,A.C.
Stumer,H.
Gairing,T.M.
1 more
Publication title:
18th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3546
Pub. Year:
1998
Page(from):
440
Page(to):
453
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430076 [0819430072]
Language:
English
Call no.:
P63600/3546
Type:
Conference Proceedings

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