DUV pellicle quality assessment based on customer priorities

Author(s):

• Wood,J.L. ( DuPont Photomasks,Inc. )
• Eynon,B.G.
• Kalk,F.D.

Publication title:

18th Annual BACUS Symposium on Photomask Technology and Management

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3546

Pub. Year:

1998

Page(from):

422

Page(to):

428

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430076 [0819430072]

Language:

English

Call no.:

P63600/3546

Type:

Conference Proceedings