Compatibility of CD-SEM metrology with advanced e-beam resists

Compatibility of CD-SEM metrology with advanced e-beam resists

Author(s):

Ng,W. ( KLA-Tencor Corp. )
Anderson,G.
Weaver,S.
Lem,H.Y.

Publication title:

18th Annual BACUS Symposium on Photomask Technology and Management

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3546

Pub. Year:

1998

Page(from):

154

Page(to):

158

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430076 [0819430072]

Language:

English

Call no.:

P63600/3546

Type:

Conference Proceedings

Details

TDL ID:	ZA00019916
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual Symposium on Photomask Technology and Management
Conf. info. (Number):	1998 : 18th
Conf. info. (Venue):	Redwood City, California, USA
Conf. info. (Date):	1998.09.16-1998.09.18

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