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Development problems of a nanometer coordinate measuring machine(NCMM)

Author(s):
Publication title:
Scattering and surface roughness III : 1-2 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4100
Pub. Year:
2000
Page(from):
167
Page(to):
172
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437457 [081943745X]
Language:
English
Call no.:
P63600/4100
Type:
Conference Proceedings

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