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Room temperature deposition of silicon oxynitride films with low stress using sputtering-type electron cyclotron resonance plasmas

Author(s):
Gao, D.
Furukawa, K.
Nakashima, H.
Gao, J.
Wang, J.
Muraoka, K.
1 more
Publication title:
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
594
Pub. Year:
2000
Page(from):
457
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995024 [1558995021]
Language:
English
Call no.:
M23500/594
Type:
Conference Proceedings

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