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Residual stresses in MEMS structures

Author(s):
Publication title:
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
594
Pub. date:
2000
Page(from):
231
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995024 [1558995021]
Language:
English
Call no.:
M23500/594
Type:
Conference Proceedings

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