Residual stresses in MEMS structures
- Author(s):
- Publication title:
- Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 594
- Pub. Year:
- 2000
- Page(from):
- 231
- Pub. info.:
- Warrendale, Pa.: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995024 [1558995021]
- Language:
- English
- Call no.:
- M23500/594
- Type:
- Conference Proceedings
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