High density plasma etching of Ta2O5-selectivity to Si and effect of UV light enhancememt
- Author(s):
Lee, K. P. Cho, H. Singh, R. K. Pearton, S. J. Hobbs, C. Tobin, P. - Publication title:
- Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 606
- Pub. Year:
- 2000
- Page(from):
- 257
- Pub. info.:
- Warrendale: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995147 [1558995145]
- Language:
- English
- Call no.:
- M23500/606
- Type:
- Conference Proceedings
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