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DIFFUSION OF Ge ALONG GRAIN BOUNDARIES DURING OXIDATION OF POLYCRYSTALLINE SILICON-GERMANIUM FILMS

Author(s):
Publication title:
Defect-interface interactions : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
319
Pub. date:
1994
Page(from):
183
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992184 [1558992189]
Language:
English
Call no.:
M23500/319
Type:
Conference Proceedings

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