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Sticking Probability and Step Coverage Studies of SiO2 and Polymerized Siloxane Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition

Author(s):
Theil, Jeremy A.  
Publication title:
Polymer/inorganic interfaces II : symposium held April 18-20, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
385
Pub. Year:
1995
Page(from):
97
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992887 [155899288X]
Language:
English
Call no.:
M23500/385
Type:
Conference Proceedings

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