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Integration Challenges of Inorganic Low-k (k 。?2.5) Materials With Cu for Sub-0.25 ヲフm Multilevel Interconnects

Author(s):
Yu, K. C.
Defilippi, J.
Tiwari, R.
Sparks, T.
Smith, D.
Olivares, M.
Selinidis, S.
Zhang, J.
Junker, K.
Braekelmann, G.
Farkas, J.
Lee, K. S.
Filipiak, S.
Lindell, M.
Watanabe, J. K.
Wetzel, J. T.
Jawarani, D.
Herrick, M. T.
Cave, N. G.
Hobbs, C. C.
15 more
Publication title:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
564
Pub. Year:
1999
Page(from):
499
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994713 [1558994718]
Language:
English
Call no.:
M23500/564
Type:
Conference Proceedings

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