Blank Cover Image

Group-III Nitride Etch Selectivity in BCl3/Cl2 ICP Plasmas

Author(s):
Shul, R. J.
Zhang, L.
Willison, C. G.
Han, J.
Pearton, S. J.
Hong, J.
Abernathy, C. R.
Lester, L. F.
3 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. Year:
1999
Page(from):
G8.1.1.
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings GaN Etching in BCl3/Cl2 Plasmas

Shul, R. J., Ashby, C. I. H., Willison, C. G., Zhang, L., Han, J., Bridges, M. M., Pearton, S. J., Lee, J. W., Lester, …

MRS - Materials Research Society

Shul, R. J., Briggs, R. D., Han, J., Pearton, S. J., Lee, J. W., Vartuli, C. B., Killeen, K. P., Ludowise, M. J.

MRS - Materials Research Society

Shul, R., Zhang, L, Baca, A., Han, J., Crawford, M., Willison, C., Pearton, S., Ren, F., Zolper, J., Lester, L.

Electrochemical Society

Lee, J. W., Pearton, S. J., Abernathy, C. R., Vawter, G. A., Shul, R. J., Bridges, M. M., Willison, C. G.

MRS - Materials Research Society

Shul, R.J., Zhang, L., Baca, A.G., Willison, C.G., Han, J., Pearton, S.J., Ren, F., Zolper, J.C., Lester, L.F.

Materials Research Society

Shul,R.J., Willison,C.G., Zhang,L.

SPIE-The International Society for Optical Engineering

Shul, R. J., Willison, C. G., Bridges, M. M., Han, J., Lee, J. W., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., …

MRS - Materials Research Society

Shul, R. J., Baca, A. G., Rieger, D. J., Hou, H., Pearton, S. J., Ren, F.

MRS - Materials Research Society

Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F.

Materials Research Society

11 Conference Proceedings ECR, ICP and RIE plasma etching of GaN

Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, …

Electrochemical Society

Shul, R. J., Vawter, G. A., Willison, C. G., Bridges, M. M., Lee, J. W., Pearton, S. J., Abernathy, C. R.

MRS - Materials Research Society

12 Conference Proceedings ICP Dry Etching of III-V Nitrides

Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J., …

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12