Group-III Nitride Etch Selectivity in BCl3/Cl2 ICP Plasmas
- Author(s):
Shul, R. J. Zhang, L. Willison, C. G. Han, J. Pearton, S. J. Hong, J. Abernathy, C. R. Lester, L. F. - Publication title:
- GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 537
- Pub. Year:
- 1999
- Page(from):
- G8.1.1.
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994430 [1558994432]
- Language:
- English
- Call no.:
- M23500/537
- Type:
- Conference Proceedings
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