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Group-III Nitride Etch Selectivity in BCl3/Cl2 ICP Plasmas

Author(s):
Shul, R. J.
Zhang, L.
Willison, C. G.
Han, J.
Pearton, S. J.
Hong, J.
Abernathy, C. R.
Lester, L. F.
3 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. date:
1999
Page(from):
G8.1.1.
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

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