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Monitoring and Controlling of Strain During MOCVD of AlGaN for UV Optoelectronics

Author(s):
Han, J.
Crawford, M. H.
Shul, R. J.
Hearne, S. J.
Chason, E.
Figiel, J. J.
Banas, M.
2 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. Year:
1999
Page(from):
G7.7.1
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

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