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Focused Ion Beam Etching of GaN

Author(s):
Flierl, C.
White, I. H.
Kuball, M.
Heard, P. J.
Allen, G. C.
Marinelli, C.
Rorison, J. M.
Penty, R. V.
Chen, Y.
Wang, S. Y.
5 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. Year:
1999
Page(from):
G6.57.1
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

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