Focused Ion Beam Etching of GaN
- Author(s):
Flierl, C. White, I. H. Kuball, M. Heard, P. J. Allen, G. C. Marinelli, C. Rorison, J. M. Penty, R. V. Chen, Y. Wang, S. Y. - Publication title:
- GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 537
- Pub. Year:
- 1999
- Page(from):
- G6.57.1
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994430 [1558994432]
- Language:
- English
- Call no.:
- M23500/537
- Type:
- Conference Proceedings
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