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Repid Thermal Processing of Implanted GaN Up to 1500°C

Author(s):
Cao, X. A.
Pearton, S. J.
Singh, R. K.
Abernathy, C. R.
Han, J.
Shul, R. J.
Rieger, D. J.
Zolper, J. C.
Wilson, R. G.
Fu, M.
Sekhar, J. A.
Guo, H. J.
Pennycook, S. J.
8 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. date:
1999
Page(from):
G6.33.1
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

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