Temperature Effect on the Quality of AlN Thin Films

Temperature Effect on the Quality of AlN Thin Films

Author(s):

Publication title:

GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

537

Pub. Year:

1999

Page(from):

G3.7.1

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994430 [1558994432]

Language:

English

Call no.:

M23500/537

Type:

Conference Proceedings

Details

TDL ID:	ZA00019847
Series ID:	PA00000011
Conf. info. (Name):	Symposium on GaN and related alloys
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.30-1998.12.04

Similar Items:

1 Conference Proceedings Epitaxial Growth of Zinc-Blende AlN by Plasma Source Molecular Beam Epitaxy Thompson, M. P., Auner, G. W., Drews, A. R., Zheleva, T. S., Jones, K. A. MRS - Materials Research Society	7 Conference Proceedings Temperature Dependent Raman Scattering and Dielectric Permittivity Measurements of Pb1-xSrxTiO3 Films Naik, V. M., Smith, M., Dai, H., Talagala, P., Naik, R., Auner, G. W., Mantese, J. Materials Research Society
2 Conference Proceedings Infrared and Ultraviolet Raman Spectra of AlN Thin Films Grown on Si(111) Naik, V.M., Haddad, D., Danylyuk, Y.V., Naik, R., Auner, G.W., Rimai, L., Weber, W.H., Uy, D. Materials Research Society	8 Conference Proceedings In Situ Reflection High-Energy Electron Diffraction Study of Structure and Morphology Evolution of AIN Thin Films During Growth Jin, F., Auner, G. W., Naik, R., Zatyko, P., Rao, U. MRS - Materials Research Society
3 Conference Proceedings The Electrical Behavior of Pd/AlN/Semiconductor Thin Film Hydrogen Sensing Structures Rimai, L., Rahman, M.H., McCullen, E.F., Zhang, L., Thakur, J.S., Naik, R., Newaz, G.M., Ng, K.Y.S., Baird, R.J., Auner, … Materials Research Society	9 Conference Proceedings Pulsed Excimer Laser Processing of AlN/GaN Thin Films Wong, W. S., Schloss, L. F., G. S. Sudhir, Linder, B. P., Yu, K-M., Weber, E. R., Sands, T., Cheung, N. W. MRS - Materials Research Society
4 Conference Proceedings Optical Properties of Anatase, Rutile and Amorphous Phases of TiO2 Thin Films Grown at Room Temperature by RF Magnetron Sputtering Naik, V.M., Haddad, D., Naik, R., Benci, J., Auner, G.W. Materials Research Society	10 Conference Proceedings AN HREM STUDY OF THE MICROSTRUCTURE OF Al CONTACT ON GaN/AlN/SiC THIN FILMS Huang, Y., Smith, L., Kim. M. J., Carpenter, R. W., Davis, R. F. MRS - Materials Research Society
5 Conference Proceedings Growth and Characterization of AlN on 6H-SiC Substrates Lekova, M., Auner, G. W., Jin, F., Naik, R., Naik, V. MRS - Materials Research Society	11 Conference Proceedings Temperature Dependence of Transport Properties of InN Films Thakur, J. S., Naik, R., Naik, V. M., Haddad, D., Auner, G. W., Lu, H., Schaff, W. J. Materials Research Society
6 Conference Proceedings Optical and Electrical Properties of Al1-xInxN Films Grown on Sapphire (0001) by Plasma Source Molecular Beam Epitaxy Danylyuk, Y.V., Lukitsch, M. J., Huang, C., Auner, G. W., Naik, R., Naik, V. M. Materials Research Society	12 Conference Proceedings Optical properties of pulsed-laser deposited BaTiO3 thin films Xu, J., Durisin, D.P., Auner, G.W. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12