Excimer Laser Ablation of Silicon at High Temperature
- Author(s):
Zhang, Y. F. Tang, Y. H. Lee, C. S. Wang, N. Bello, I Lee, S. T. - Publication title:
- Advances in laser ablation of materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 526
- Pub. Year:
- 1998
- Page(from):
- 39
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994324 [1558994327]
- Language:
- English
- Call no.:
- M23500/526
- Type:
- Conference Proceedings
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