Preparation and Characterization of High-Surface-Area Aluminum Nitride Thin Films
- Author(s):
- Publication title:
- Advanced catalytic materials 1996 : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 454
- Pub. Year:
- 1997
- Page(from):
- 53
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993587 [1558993584]
- Language:
- English
- Call no.:
- M23500/454
- Type:
- Conference Proceedings
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