Step Coverage of Pb(Zr,Ti)O3 Thin Films Grown by MOCVD

Step Coverage of Pb(Zr,Ti)O3 Thin Films Grown by MOCVD

Author(s):

Publication title:

Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

433

Pub. Year:

1996

Page(from):

201

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993365 [1558993363]

Language:

English

Call no.:

M23500/433

Type:

Conference Proceedings

Details

TDL ID:	ZA00019837
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	5th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.07-1996.04.12

Similar Items:

1 Conference Proceedings Photo-enhanced MOCVD of Pb(Zr,i)O₃ thin films using O₃ M. Shimizu, M. Sugiyama, H. Fujisawa, T. Shiosaki Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Thickness dependence and electrical properties of Ultrathin PZT films grown on SrRuO3/SrTiO3 by MOCVD Shimizu, M., Fujisawa, H., Niu, H. MRS-Materials Research Society
2 Conference Proceedings Control of Grain Size of Pb(Zr,Ti)O3 Thin Films by MOCVD and the Effect of Size on the Electrical Properties Fujisawa, H., Nakashima, S., Shimizu, M., Niu, H. MRS - Materials Research Society	8 Conference Proceedings Piezoresponse Measurements for Pb(Zr,Ti)O3 Island Structure Using Scanning Probe Microscopy Fujisawa, H., Morimoto, K., Shimizu, M., Niu, H., Honda, K., Ohtani, S. Materials Research Society
3 Conference Proceedings Effects of Sputtered Ir and IrO2 Electrodes on the Properties of PZT Thin Films Deposited by MOCVD Shimizu, M., Fujisawa, H., Hyodo, S., Nakashima, S., Niu, H., Okino, H., Shiosaki, T. MRS - Materials Research Society	9 Conference Proceedings GROWTH AND CHARACTERIZATION OF FERROELECTRIC Pb(Zr,Ti)O3 THIN FILMS BY MOCVD USING A 6 INCH SINGLE WAFER CVD SYSTEM Shimizu, Masaru, Fujimoto, Masashi, Katayama, Takuma, Shiosaki, Tadashi, Nakaya, Kenichi, Fukagawa, Mitsuru, Tanikawa, … MRS - Materials Research Society
4 Conference Proceedings Effects of the Purity of Metalorganic Sources on the Electrical Properties of Pb(Zr,Ti)O3 Thin Films by MOCVD Shimizu, M., Yoshida, M., Fujisawa, H., Niu, H. MRS - Materials Research Society	10 Conference Proceedings Growth and characterization of Pb-based ferroelectric oxide thin films by MOCVD Shimizu, Masaru, Shiosaki, Tadashi Materials Research Society
5 Conference Proceedings Investigation of Domain Wall Velocity and Nucleation Rate in Polarization Switching of Epitaxial Pb(Zr,Ti)O3 Thin Films Using Piezoresponse Scanning Force … Fujisawa, H., Yagi, T., Shimizu, M., Niu, H. Materials Research Society	11 Conference Proceedings Ir Thin Films for PZT Capacitors Prepared by MOCVD Using a New Ir Precursor Fujisawa, H., Watari, S., Shimizu, M., Niu, H., Oshima, N. Materials Research Society
6 Conference Proceedings Observation of domain structure at initial growth state of PbTiO3 thin films grown by MOCVD Fujisawa, H., Shimizu, M., Niu, H., Honda, K., Ohtani, S. MRS-Materials Research Society	12 Conference Proceedings Ferroelectric (Pb, Ba)(Zr, Ti) O3 thin films grown by MOCVD Hoffmann-Eifert, S., Puchalla, J., Cattaneo, L., Carella, S., Waser, R. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12