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Step Coverage of Pb(Zr,Ti)O3 Thin Films Grown by MOCVD

Author(s):
Publication title:
Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
433
Pub. date:
1996
Page(from):
201
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993365 [1558993363]
Language:
English
Call no.:
M23500/433
Type:
Conference Proceedings

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