Dry Etching Issues in the Integration of Ferroelectric Thin Film Capacitors

Dry Etching Issues in the Integration of Ferroelectric Thin Film Capacitors

Author(s):

Publication title:

Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

433

Pub. Year:

1996

Page(from):

189

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993365 [1558993363]

Language:

English

Call no.:

M23500/433

Type:

Conference Proceedings

Details

TDL ID:	ZA00019837
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	5th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.07-1996.04.12

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