High Temperature Surface Degradation of III-V Nitrides

High Temperature Surface Degradation of III-V Nitrides

Author(s):

Vartuli, C. B.

Publication title:

III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

423

Pub. Year:

1996

Page(from):

569

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993266 [1558993266]

Language:

English

Call no.:

M23500/423

Type:

Conference Proceedings

Details

TDL ID:	ZA00019836
Series ID:	PA00000011
Conf. info. (Name):	Symposium on III-nitride, SiC and diamond materials for electronic devices
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

Similar Items:

1 Conference Proceedings Role of C. O and H in III-Nitrides Abernathy, C. R., Pearton, S. J., Mackenzie, J. D., Lee, J. W., Vartuli, C. B., Wilson, R. G., Shul, R. J., Zolper, J. … MRS - Materials Research Society	7 Conference Proceedings Chemical Etching of AlN and InAlN in KOH Solutions Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Zolper, J. C., Shul, R. J., Ren, F. MRS - Materials Research Society
2 Conference Proceedings Rapid Thermal Processing of III-Nitrides Hong, J., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Crockett, R. V., Pearton, S. … MRS - Materials Research Society	8 Conference Proceedings W, WSix and Ti/Al Low Resistance Ohmic Contacts to InGaN, InN and InAlN Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., Zolper, J. C., Lovejoy, M. L., Baca, A. … MRS - Materials Research Society
3 Conference Proceedings Wet Chemical Etching Survey of III-Nitrides Cho, Hyun, Hays, D. C., Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Ren, F., Zolper, J. C. MRS - Materials Research Society	9 Conference Proceedings Effect of Dry Etching in III-Nitride Surface Properties Ren, F., Lothian, J.R., Pearton, S.J., Abernathy, C.R., Vartuli, C.B., Karlicek, B., Karlicek, R.F., Jr., MacKenzie, … Electrochemical Society
4 Conference Proceedings Comparison of ICI and Ibr for Dry Etching of III-Nitrides Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Shul, R. J. MRS - Materials Research Society	10 Conference Proceedings Ion Implantation Doping and High Temperature Annealing of GaN Zolper, J. C., Crawford, M. Hagerott, Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Yuan, C., Stall, … MRS - Materials Research Society
5 Conference Proceedings High Resistivity InAlN by Nitrogen or Oxygen Implantation Zolper, J. C., Pearton, S. J., Abernathy, C. R., Vartuli, C. B. MRS - Materials Research Society	11 Conference Proceedings ICP Dry Etching of III-V Nitrides Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J., … MRS - Materials Research Society
6 Conference Proceedings Status of Ion Implantation Doping and Isolation of III-V Nitrides Zolper, J.C., Pearton, S.J., Abernathy, C.R., Vartuli, C. B., Yuan, C., Stall, R.A. Electrochemical Society	12 Conference Proceedings Properties of H, O and C in GaN Pearton, S. J., Abernathy, C. R., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Ren, F., Wilson, R. G., Zavada, J. M., … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12