Improved Aluminum Nitride Thin Films Grown by MOCVD From Tritertiarybutylaluminum and Ammonia
- Author(s):
Metzger, T. Born, E. Stommer, R. Rieger, W. Dimitrov, R. Lentz, D. Angerer, H. Ambacher, O. Stutzmann, M. - Publication title:
- III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 423
- Pub. Year:
- 1996
- Page(from):
- 323
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993266 [1558993266]
- Language:
- English
- Call no.:
- M23500/423
- Type:
- Conference Proceedings
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