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Morphologies and Growth Modes of FeSi and β-FeSi2 Layers Prepared by Rapid Thermal Annealing

Author(s):
Amesz, P. H.
Jorgensen, L. V.
Libezny, M.
Poortmans, J.
Nijs, J.
Veen, A. van
Schut, H.
Hosson, J. Th. M. de
3 more
Publication title:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
402
Pub. Year:
1996
Page(from):
373
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993051 [1558993053]
Language:
English
Call no.:
M23500/402
Type:
Conference Proceedings

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